Poster Alert: High power HHG source driven by a Black Dwarf laser system
At UFO XIV, we will also present our latest progress on Moonlander, our high-harmonic-generation (HHG)-based XUV source designed for advanced metrology and ultrafast science applications. Leveraging kilowatt-class Yb:YAG Innoslab lasers combined with efficient multipass-cell pulse compression, we achieve milliwatt-level average power at 13.5 nm — a crucial wavelength for EUV lithography.
Highlights from the Poster
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Demonstration of HHG efficiency at 13.5 nm, the key EUV wavelength.
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Operation with 20–50 W average power drivers, delivering µW-level XUV output with state-of-the-art conversion efficiencies.
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Path towards > 600 W average power with sub-50 fs compressed pulses within the MEGA EUV project.
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Integration with high-speed scatterometry for semiconductor nanostructure analysis.
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Robust gas target and filtering design ensuring stability at high average powers.
Don’t miss the poster session at Ultrafast Optics XIV, presented by Dr. Robert Riedel, for a closer look at the experimental setup and results.
- Poster Session 2: Tuesday, 7 October 2025 | 12:45 – 14:00
📍 UFO XIV, Azores, Portugal
Read the full poster here: Poster_High power HHG source driven by a Black Dwarf
