Brilliant EUV sources based on laser-driven high harmonic generation (HHG) provide all the desired quality parameters for future metrology and inspection tools in the chip industry. We work on various technology improvements in order to deliver what the industry needs:
The Moonlander HHG is an efficient coherent EUV source for time-resolved spectroscopy such as ARPES.
Driven by our high-power laser technology, the Moonlander HHG provides high photon flux at high repetition rates in a compact and robust design.
A second, synchronized optical output from UV to mid-IR can be provided with a tunable OPCPA, hence offering a full pump-probe suite to take the next step in time-resolved photoelectron spectroscopy.